Harnessing charge injection in Kelvin probe force microscopy for the evaluation of oxides
نویسندگان
چکیده
We report on a quantitative use of Kelvin probe force microscopy (KPFM) for the analysis charge injection in thin oxides. Here, dielectrics are investigated through an atomic tip that is used as movable (virtual) top-electrode. The injected and read-out respectively by alternating direct contact with oxide, non-contact surface potential imaging. difference (CPD) between microscope oxide to measure distribution under multiple electrical stress conditions, thus correlating locally trapped dielectric properties.
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ژورنال
عنوان ژورنال: Solid-state Electronics
سال: 2021
ISSN: ['0038-1101', '1879-2405']
DOI: https://doi.org/10.1016/j.sse.2021.108136